Fresh Insights on the Flow of Electrons by Direct Observation of Spoke Evolution in Magnetron Sputtering

© Kurt J. Lesker Company®

Articel from INNOVATE, technical information resource by Kurt J. Lesker Company® 25.10.2017

In a July 2017 publication, Drs. André Anders and Yuchen Yang provide an enhanced description of the flows and energy of electrons at the face of a magnetron sputter cathode. By combining a unique imaging process and a linear cathode (target) the researchers were able to generate a series of time/space images which shows plasma instabilities driven by the motion of electrons, within the cathode’s magnetic field. The images show the effects on plasma flow for both conventional DC magnetron sputtering (dcMS) and also high power impulse magnetron sputtering (HiPIMs). The full paper is available on line at http://aip.scitation.org/doi/10.1063/1.4994192.

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27. Okt. 2017

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