3D-Micromac unveils high-troughput selective laser annealing system for magnetic sensor manufacturing

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23. Nov. 2020

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Tunnel Magnetoresistance (TMR) sensor manufacturer Crocus Technology among first to install new microVEGA xMR system for production applications

3D-Micromac AG, the industry leader in laser micromachining and roll-to-roll laser systems for the semiconductor, photovoltaic, medical device and electronics markets, introduced the first industrial selective laser annealing system for magnetic sensor formation—the microVEGA™ xMR. Incorporating a highly flexible, high-throughput tool configuration with on-the-fly spot and variable laser energy, the microVEGA xMR accommodates both Giant Magnetoresistance (GMR) and Tunnel Magnetoresistance (TMR) sensors, as well as easily adjusts magnetic orientation, sensor position and sensor dimension—making it an ideal solution for magnetic sensor production.

Crocus Technology, a leading manufacturer of innovative XtremeSense™ tunnel magneto-resistance (TMR) magnetic sensors, has purchased and installed a microVEGA xMR system in its facility in Santa Clara, Calif., where the tool will be used in the production of its TMR sensors utilized in consumer electronics, industrial and Internet of Things (IoT) applications.

Press release